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Growth of Gallium Nitride Films on Multilayer Graphene Template Using Plasma-Enhanced Atomic Layer Deposition
Ni80Fe20 nanotubes with optimized spintronic functionalities prepared by atomic layer deposition
On the Contact Optimization of ALD-Based MoS2 FETs: Correlation of Processing Conditions and Interface Chemistry with Device Electrical Performance
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Trapping and reliability issues in GaN-based MIS HEMTs with partially recessed gate
Type:
Journal
Info:
Microelectronics Reliability 2015
Date:
2015-11-30
Author Information
| Name | Institution |
|---|---|
| Gaudenzio Meneghesso | University of Padova |
| Matteo Meneghini | University of Padova |
| Davide Bisi | University of Padova |
| Isabella Rossetto | University of Padova |
| Tian-Li Wu | IMEC |
| Marleen Van Hove | IMEC |
| Denis Marcon | IMEC |
| Steve Stoffels | IMEC |
| Stefaan Decoutere | IMEC |
| Enrico Zanoni | University of Padova |
Films
Film/Plasma Properties
Substrates
Keywords
Notes
| 429 |