Publication Information

Title: Trapping and reliability issues in GaN-based MIS HEMTs with partially recessed gate

Type: Journal

Info: Microelectronics Reliability 2015

Date: 2015-11-30

DOI: http://dx.doi.org/10.1016/j.microrel.2015.11.024

Author Information

Name

Institution

Gaudenzio Meneghesso

University of Padova

Matteo Meneghini

University of Padova

Davide Bisi

University of Padova

Isabella Rossetto

University of Padova

Tian-Li Wu

IMEC

Marleen Van Hove

IMEC

Denis Marcon

IMEC

Steve Stoffels

IMEC

Stefaan Decoutere

IMEC

Enrico Zanoni

University of Padova

Films

Plasma SiNx using Unknown

Deposition Temperature Range N/A

Thermal Al2O3 using Unknown

Deposition Temperature Range N/A

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Substrates

Keywords

Notes

429


Mark Sowa

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