Search 1531 plasma ALD publications by:
Search 1531 plasma ALD publications by:
Publication Information
Title:
Trapping and reliability issues in GaN-based MIS HEMTs with partially recessed gate
Type:
Journal
Info:
Microelectronics Reliability 2015
Date:
2015-11-30
Author Information
Name | Institution |
---|---|
Gaudenzio Meneghesso | University of Padova |
Matteo Meneghini | University of Padova |
Davide Bisi | University of Padova |
Isabella Rossetto | University of Padova |
Tian-Li Wu | IMEC |
Marleen Van Hove | IMEC |
Denis Marcon | IMEC |
Steve Stoffels | IMEC |
Stefaan Decoutere | IMEC |
Enrico Zanoni | University of Padova |
Films
Film/Plasma Properties
Substrates
Keywords
Notes
429 |
Popular Precursors
Top Authors
Erwin (W.M.M.) Kessels |
Hyeongtag Jeon |
Hyungjun Kim |
Mauritius C. M. (Richard) van de Sanden |
Christophe Detavernier |