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Publication Information

Title: Trapping and reliability issues in GaN-based MIS HEMTs with partially recessed gate

Type: Journal

Info: Microelectronics Reliability 2015

Date: 2015-11-30

DOI: http://dx.doi.org/10.1016/j.microrel.2015.11.024

Author Information

Name

Institution

University of Padova

University of Padova

University of Padova

University of Padova

IMEC

IMEC

IMEC

IMEC

IMEC

University of Padova

Films

Plasma SiNx using Unknown

Deposition Temperature Range N/A

Thermal Al2O3 using Unknown

Deposition Temperature Range N/A

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Substrates

Keywords

Notes

429



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