December 2022 Stats


The publication database currently has 1663 entries.
204 Films
274 Precursors
78 Dep Hardware Sets
253 Characteristics
91 Theses
5104 Authors

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Plasma-Enhanced Atomic Layer Deposition of p-Type Copper Oxide Semiconductors with Tunable Phase, Oxidation State, and Morphology Investigation of hydrogen impurities in PE-ALD AlN thin films by IBA methods Control of ion energy during plasma enhanced atomic layer deposition: A new strategy for the modulation of TiN growth delay on SiO2 Comparison of chemical stability and corrosion resistance of group IV metal oxide films formed by thermal and plasma-enhanced atomic layer deposition Comparison of AlF3 thin films grown by thermal and plasma enhanced atomic layer deposition

Denis Marcon Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Denis Marcon returned 5 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Correlation of interface states/border traps and threshold voltage shift on AlGaN/GaN metal-insulator-semiconductor high-electron-mobility transistors
2Impact of gate insulator on the dc and dynamic performance of AlGaN/GaN MIS-HEMTs
3Time-Dependent Breakdown Mechanisms and Reliability Improvement in Edge Terminated AlGaN/GaN Schottky Diodes Under HTRB Tests
4Toward Understanding Positive Bias Temperature Instability in Fully Recessed-Gate GaN MISFETs
5Trapping and reliability issues in GaN-based MIS HEMTs with partially recessed gate

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