Search 1556 plasma ALD publications by:
Search 1556 plasma ALD publications by:
Correlation of interface states/border traps and threshold voltage shift on AlGaN/GaN metal-insulator-semiconductor high-electron-mobility transistors
Type:
Journal
Info:
Applied Physics Letters 107, 093507 (2015)
Date:
2015-08-24
Author Information
Name | Institution |
---|---|
Tian-Li Wu | IMEC |
Denis Marcon | IMEC |
Benoit Bakeroot | IMEC |
Brice De Jaeger | IMEC |
H. C. Lin | IMEC |
Jacopo Franco | IMEC |
Steve Stoffels | IMEC |
Marleen Van Hove | IMEC |
Robin Roelofs | ASM Microchemistry Oy |
Guido Groeseneken | IMEC |
Stefaan Decoutere | IMEC |
Films
Plasma SiNx
Film/Plasma Properties
Characteristic: Electrical Properties
Analysis: -
Characteristic: Interface Trap Density
Analysis: -
Characteristic: Threshold Voltage Shift
Analysis: -
Substrates
AlGaN |
Keywords
Notes
388 |
Popular Precursors
Top Authors
Erwin (W.M.M.) Kessels |
Hyeongtag Jeon |
Hyungjun Kim |
Mauritius C. M. (Richard) van de Sanden |
Christophe Detavernier |