SnO2 nanotubes fabricated using electrospinning and atomic layer deposition and their gas sensing performance

Publication Information

Title: SnO₂ nanotubes fabricated using electrospinning and atomic layer deposition and their gas sensing performance

Type: Journal

Info: 2010 Nanotechnology 21 245605

Date: 2010-05-25

DOI: http://dx.doi.org/10.1088/0957-4484/21/24/245605

Author Information

Name

Institution

Won-Sik Kim

Seoul National University

Byoung-Sun Lee

Seoul National University

Dai-Hong Kim

Seoul National University

Hong-Chan Kim

Seoul National University

Woong-Ryeol Yu

Seoul National University

Seong-Hyeon Hong

Seoul National University

Films

Plasma SnO₂ using Unknown

Deposition Temperature Range N/A

DiButylTinDiAcetate, DBTDA, ((CH₃CO₂)₂Sn[(CH₂)₃CH₃]₂)

1067-33-0

Where to buy precursor

O₂, Oxygen

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Crystallinity, Crystal Structure, Grain Size, Atomic Structure

XRD, X-Ray Diffraction

MAC Scientific Co., M18XHF

Morphology, Roughness, Topography

SEM, Scanning Electron Microscopy

JEOL JSM-6330F

Morphology, Roughness, Topography

TEM, Transmission Electron Microscope

JEOL JEM-3000F

Gas Sensing

Custom

Substrates

PAN, PolyAcryloNitrile

Keywords

Sensors

Sacrificial Template

Calcination

Notes

Mark Sowa

Shortcuts

Films

Precursors

Deposition Hardware

Film and Plasma Characteristics

Multi-factor Search

ALD and PEALD Background

On-line PEALD Theses

About plasma-ald.com

ALD Links

Publication Information

Author Information

Films

Plasma SnO2 using Unknown

Deposition Temperature Range N/A

Film/Plasma Properties

Substrates

Keywords

Notes

Shortcuts

Plasma SnO₂ using Unknown