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Growth of Gallium Nitride Films on Multilayer Graphene Template Using Plasma-Enhanced Atomic Layer Deposition
Ni80Fe20 nanotubes with optimized spintronic functionalities prepared by atomic layer deposition
On the Contact Optimization of ALD-Based MoS2 FETs: Correlation of Processing Conditions and Interface Chemistry with Device Electrical Performance
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SnO2 nanotubes fabricated using electrospinning and atomic layer deposition and their gas sensing performance
Type:
Journal
Info:
2010 Nanotechnology 21 245605
Date:
2010-05-25
Author Information
| Name | Institution |
|---|---|
| Won-Sik Kim | Seoul National University |
| Byoung-Sun Lee | Seoul National University |
| Dai-Hong Kim | Seoul National University |
| Hong-Chan Kim | Seoul National University |
| Woong-Ryeol Yu | Seoul National University |
| Seong-Hyeon Hong | Seoul National University |
Films
Film/Plasma Properties
Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction
Characteristic: Morphology, Roughness, Topography
Analysis: SEM, Scanning Electron Microscopy
Characteristic: Morphology, Roughness, Topography
Analysis: TEM, Transmission Electron Microscope
Characteristic: Gas Sensing
Analysis: Custom
Substrates
| PAN, PolyAcryloNitrile |
Keywords
| Sensors |
| Sacrificial Template |
| Calcination |
Notes
| 76 |