Dai-Hong Kim Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Dai-Hong Kim returned 3 record(s).

Number	Title
1	Gas sensing properties in epitaxial SnO₂ films grown on TiO₂ single crystals with various orientations
2	SnO₂ nanotubes fabricated using electrospinning and atomic layer deposition and their gas sensing performance
3	Structural characteristics of epitaxial SnO₂ films deposited on a- and m-cut sapphire by ALD