Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


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Seong-Hyeon Hong Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Seong-Hyeon Hong returned 3 record(s).

NumberTitle
1Structural characteristics of epitaxial SnO2 films deposited on a- and m-cut sapphire by ALD
2SnO2 nanotubes fabricated using electrospinning and atomic layer deposition and their gas sensing performance
3Gas sensing properties in epitaxial SnO2 films grown on TiO2 single crystals with various orientations