Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


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Byoung-Sun Lee Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Byoung-Sun Lee returned 1 record(s).

NumberTitle
1SnO2 nanotubes fabricated using electrospinning and atomic layer deposition and their gas sensing performance