Publication Information

Title:
Increment of dielectric properties of SrTiO3 thin films by SrO interlayer on Ru bottom electrodes
Type:
Journal
Info:
Applied Physics Letters 91, 062910 (2007)
Date:
2007-07-16

Author Information

Name Institution
Ji-Hoon AhnKorea Advanced Institute of Science and Technology
Ja-Yong KimKorea Advanced Institute of Science and Technology
Sang-Won KangKorea Advanced Institute of Science and Technology
Jin-Hyock KimHynix Semiconductor
Jae-Sung RohHynix Semiconductor

Films


Film/Plasma Properties

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction

Characteristic: Interlayer
Analysis: TEM, Transmission Electron Microscope

Characteristic: Chemical Composition, Impurities
Analysis: EDS, EDX, Energy Dispersive X-ray Spectroscopy

Characteristic: Dielectric Constant, Permittivity
Analysis: C-V, Capacitance-Voltage Measurements

Characteristic: EOT, Equivalent Oxide Thickness
Analysis: C-V, Capacitance-Voltage Measurements

Substrates

Ru
SrRuO

Keywords

Notes

1326