November 2022 Stats

The publication database currently has 1655 entries.

204 Films

274 Precursors

78 Dep Hardware Sets

253 Characteristics

91 Theses

5090 Authors

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2021 Year in Review

Recent Database Additions

Initial and steady-state Ru growth by atomic layer deposition studied by in situ Angle Resolved X-ray Photoelectron Spectroscopy Innovative remote plasma source for atomic layer deposition for GaN devices Influence of plasma species on the early-stage growth kinetics of epitaxial InN grown by plasma-enhanced atomic layer deposition Optical in situ monitoring of plasma-enhanced atomic layer deposition process The role of active species in the N₂ and N₂-H₂ RF afterglows on selective surface nitriding of ALD-grown TiO₂ films

Jae-Sung Roh Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Jae-Sung Roh returned 6 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

Number	Title
1	Effect of Sr-Ruthenate Seed Layer on Dielectric Properties of SrTiO₃ Thin Films Prepared by Plasma-Enhanced Atomic Layer Deposition
2	Enhanced Dielectric Properties of SrTiO₃ Films with a SrRuO₃ Seed by Plasma-Enhanced Atomic Layer Deposition
3	Increment of dielectric properties of SrTiO₃ thin films by SrO interlayer on Ru bottom electrodes
4	Influence of oxidant source on the property of atomic layer deposited Al₂O₃ on hydrogen-terminated Si substrate
5	Interfacial Layer Properties of HfO₂ Films Formed by Plasma-Enhanced Atomic Layer Deposition on Silicon
6	Low-Temperature ALD Growth of SrTiO₃ Thin Films from Sr beta-Diketonates and Ti Alkoxide Precursors Using Oxygen Remote Plasma as an Oxidation Source