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The publication database currently has 1567 entries.

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In vacuo investigations on the nucleation of TaCN by plasma enhanced atomic layer deposition In vacuo studies on plasma-enhanced atomic layer deposition of cobalt thin films Influence of oxygen source on the ferroelectric properties of ALD grown Hf_1-xZr_xO₂ films

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195 Films Compositions

265 Precursors and Plasma Gases

76 Deposition Hardwares

242 Film and Plasma Characteristics

Jae-Sung Roh Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Jae-Sung Roh returned 6 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

Number	Title
1	Effect of Sr-Ruthenate Seed Layer on Dielectric Properties of SrTiO₃ Thin Films Prepared by Plasma-Enhanced Atomic Layer Deposition
2	Enhanced Dielectric Properties of SrTiO₃ Films with a SrRuO₃ Seed by Plasma-Enhanced Atomic Layer Deposition
3	Increment of dielectric properties of SrTiO₃ thin films by SrO interlayer on Ru bottom electrodes
4	Influence of oxidant source on the property of atomic layer deposited Al₂O₃ on hydrogen-terminated Si substrate
5	Interfacial Layer Properties of HfO₂ Films Formed by Plasma-Enhanced Atomic Layer Deposition on Silicon
6	Low-Temperature ALD Growth of SrTiO₃ Thin Films from Sr beta-Diketonates and Ti Alkoxide Precursors Using Oxygen Remote Plasma as an Oxidation Source