Publication Information

Title: Effect of Sr-Ruthenate Seed Layer on Dielectric Properties of SrTiO3 Thin Films Prepared by Plasma-Enhanced Atomic Layer Deposition

Type: Journal

Info: Journal of The Electrochemical Society, 155(10) G185-G188 (2008)

Date: 2008-08-01

DOI: http://dx.doi.org/10.1149/1.2960898

Author Information

Name

Institution

Korea Advanced Institute of Science and Technology

Korea Advanced Institute of Science and Technology

Hynix Semiconductor

Hynix Semiconductor

Hynix Semiconductor

Films

Plasma SrTiO3 using Custom

Deposition Temperature Range N/A

36830-74-7

546-68-9

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Thickness

Ellipsometry

Gaertner L116C

Thickness

TEM, Transmission Electron Microscope

Unknown

Crystallinity, Crystal Structure, Grain Size, Atomic Structure

XRD, X-Ray Diffraction

Rigaku

Chemical Composition, Impurities

EDS, EDX, Energy Dispersive X-ray Spectroscopy

Unknown

Dielectric Constant, Permittivity

C-V, Capacitance-Voltage Measurements

Keithley 590 CV Analyzer

Substrates

SrRuO

Ru

Keywords

DRAM capacitor

Capacitors

Notes

Sr(DPM)2 was dissolved in butyl acetate and supplied via liquid delivery.

600C RTA in N2 for 10min.

126



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