Publication Information

Title: High Performance and Low power Monolithic Three-Dimensional Sub-50 nm Poly Si Thin film transistor (TFTs) Circuits

Type: Journal

Info: Scientific Reports 7, Article number: 1368 (2017)

Date: 2017-01-10

DOI: http://dx.doi.org/10.1038/s41598-017-01012-y

Author Information

Name

Institution

National Nano Device Labs

National Nano Device Labs

National Nano Device Labs

National Nano Device Labs

National Nano Device Labs

National Tsing Hua University

National Chiao Tung University

National Nano Device Labs

National Nano Device Labs

National Nano Device Labs

National Nano Device Labs

National Nano Device Labs

National Nano Device Labs

National Tsing Hua University

National Nano Device Labs

Films

Plasma Al2O3 using Unknown

Deposition Temperature Range N/A

75-24-1

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Substrates

Keywords

Notes

1086



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