Yu-Lun Chueh Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Yu-Lun Chueh returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Ferroelectricity of HfZrO2 in Energy Landscape With Surface Potential Gain for Low-Power Steep-Slope Transistors
2Growth of controllable ZnO film by atomic layer deposition technique via inductively coupled plasma treatment
3High Performance and Low power Monolithic Three-Dimensional Sub-50 nm Poly Si Thin film transistor (TFTs) Circuits