Yu-Lun Chueh Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Yu-Lun Chueh returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1High Performance and Low power Monolithic Three-Dimensional Sub-50 nm Poly Si Thin film transistor (TFTs) Circuits
2Growth of controllable ZnO film by atomic layer deposition technique via inductively coupled plasma treatment
3Ferroelectricity of HfZrO2 in Energy Landscape With Surface Potential Gain for Low-Power Steep-Slope Transistors