On the Trail Ancient Worlds: Comparative Study of Commercial Scandium and Yttrium Precursors, Asgard, Midgard, Vanaheim and Olympus
Type:
Conference Proceedings
Info:
ALD 2024
Date:
2024-08-05
Author Information
| Name | Institution |
|---|---|
| Martin Wilken | Ruhr-University Bochum |
| Thilo Hepp | Dockweiler Chemicals GmbH |
| Oliver Briel | Dockweiler Chemicals GmbH |
| A. Muriqi | Tyndall National Institute, University College Cork |
| C. Cho | Ruhr-University Bochum |
| M. G. Nolan | Tyndall National Institute, University College Cork |
| Anjana Devi | Leibniz Institute for Solid State and Materials Research |
Films
Film/Plasma Properties
Substrates
Notes
| 1730 |