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Publication Information

Title: Ultraviolet photodetector based on MgxZn1-xO films using plasma-enhanced atomic layer deposition

Type: Journal

Info: Journal of Vacuum Science & Technology A 34, 01A141 (2016)

Date: 2015-12-04

DOI: http://dx.doi.org/10.1116/1.4938074

Author Information

Name

Institution

National Cheng Kung University

National Cheng Kung University

National Cheng Kung University

Films

Plasma MgxZn1-xO using Unknown

Deposition Temperature = 100C

1284-72-6

557-20-0

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Chemical Composition, Impurities

EDS, EDX, Energy Dispersive X-ray Spectroscopy

Unknown

Crystallinity, Crystal Structure, Grain Size, Atomic Structure

XRD, X-Ray Diffraction

Unknown

Thickness

Unknown

Unknown

Transmittance

Unknown

Unknown

Optical Bandgap

Unknown

Unknown

Dark Current

Unknown

Unknown

Photocurrent

Unknown

Unknown

Substrates

Sapphire

Keywords

Photodetectors

Notes

449



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