
Ultraviolet photodetector based on MgxZn1-xO films using plasma-enhanced atomic layer deposition
Type:
Journal
Info:
Journal of Vacuum Science & Technology A 34, 01A141 (2016)
Date:
2015-12-04
Author Information
Name | Institution |
---|---|
Yu-Chang Lin | National Cheng Kung University |
Hsin-Ying Lee | National Cheng Kung University |
Ching-Ting Lee | National Cheng Kung University |
Films
Film/Plasma Properties
Characteristic: Chemical Composition, Impurities
Analysis: EDS, EDX, Energy Dispersive X-ray Spectroscopy
Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction
Characteristic: Thickness
Analysis: -
Characteristic: Transmittance
Analysis: -
Characteristic: Optical Bandgap
Analysis: -
Characteristic: Dark Current
Analysis: -
Characteristic: Photocurrent
Analysis: -
Substrates
Sapphire |
Keywords
Photodetectors |
Notes
449 |