Publication Information

Title:
Ultraviolet photodetector based on MgxZn1-xO films using plasma-enhanced atomic layer deposition
Type:
Journal
Info:
Journal of Vacuum Science & Technology A 34, 01A141 (2016)
Date:
2015-12-04

Author Information

Name Institution
Yu-Chang LinNational Cheng Kung University
Hsin-Ying LeeNational Cheng Kung University
Ching-Ting LeeNational Cheng Kung University

Films

Plasma MgxZn1-xO


Film/Plasma Properties

Characteristic: Chemical Composition, Impurities
Analysis: EDS, EDX, Energy Dispersive X-ray Spectroscopy

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction

Characteristic: Thickness
Analysis: -

Characteristic: Transmittance
Analysis: -

Characteristic: Optical Bandgap
Analysis: -

Characteristic: Dark Current
Analysis: -

Characteristic: Photocurrent
Analysis: -

Substrates

Sapphire

Keywords

Photodetectors

Notes

449