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An economical, compact inductively coupled plasma source.

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  • Plasma-Enhanced Atomic Layer Deposition
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Yu-Chang Lin Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Yu-Chang Lin returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Ultraviolet photodetector based on MgxZn1-xO films using plasma-enhanced atomic layer deposition
2Effect of hydrogen peroxide pretreatment on ZnO-based metal-semiconductor-metal ultraviolet photodetectors deposited using plasma-enhanced atomic layer deposition
3Carbon nanotube-supported Cu3N nanocrystals as a highly active catalyst for oxygen reduction reaction