Publication Information

Title:
Graphene photodetectors with a bandwidth >76 GHz fabricated in a 6" wafer process line
Type:
Journal
Info:
2017 J. Phys. D: Appl. Phys. 50 124004
Date:
2017-01-26

Author Information

Name Institution
Daniel SchallApplied Micro and Optoelectronic (AMO) GmbH
Caroline PorschatisApplied Micro and Optoelectronic (AMO) GmbH
Martin OttoApplied Micro and Optoelectronic (AMO) GmbH
Daniel NeumaierApplied Micro and Optoelectronic (AMO) GmbH

Films

Plasma Al2O3

Hardware used: Unknown


Film/Plasma Properties

Substrates

Keywords

Notes

991