Martin Otto Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Martin Otto returned 5 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Graphene based on-chip variable optical attenuator operating at 855 nm wavelength
2Experimental verification of electro-refractive phase modulation in graphene
3Low Resistive Edge Contacts to CVD-Grown Graphene Using a CMOS Compatible Metal
4Plasma-Enhanced Atomic Layer Deposition of Al2O3 on Graphene Using Monolayer hBN as Interfacial Layer
5Graphene photodetectors with a bandwidth >76 GHz fabricated in a 6" wafer process line