Graphene based on-chip variable optical attenuator operating at 855 nm wavelength

Type:
Journal
Info:
Optics Express, v. 25, n. 25, p. 31660--31669 (2017)
Date:
2017-11-12
DOI:
http://dx.doi.org/10.1364/OE.25.031660

Author Information

Name Institution
Muhammad MohsinApplied Micro and Optoelectronic (AMO) GmbH
Daniel SchallApplied Micro and Optoelectronic (AMO) GmbH
Martin OttoApplied Micro and Optoelectronic (AMO) GmbH
Bartos ChmielakApplied Micro and Optoelectronic (AMO) GmbH
Caroline PorschatisApplied Micro and Optoelectronic (AMO) GmbH
Jens BoltenApplied Micro and Optoelectronic (AMO) GmbH
Daniel NeumaierApplied Micro and Optoelectronic (AMO) GmbH

Films

Plasma Al2O3

Hardware used: Unknown
TMA, Trimethylaluminum, Trimethylalumane, AlMe3, Al(CH3)3
CAS#: 75-24-1
Where to buy precursor
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature Range N/A

Film/Plasma Properties

Substrates

HSQ, Hydrogen SilsesQuioxane

Notes

1084