Graphene based on-chip variable optical attenuator operating at 855 nm wavelength

Type:
Journal
Info:
Optics Express, v. 25, n. 25, p. 31660--31669 (2017)
Date:
2017-11-12

Author Information

Name Institution
Muhammad MohsinApplied Micro and Optoelectronic (AMO) GmbH
Daniel SchallApplied Micro and Optoelectronic (AMO) GmbH
Martin OttoApplied Micro and Optoelectronic (AMO) GmbH
Bartos ChmielakApplied Micro and Optoelectronic (AMO) GmbH
Caroline PorschatisApplied Micro and Optoelectronic (AMO) GmbH
Jens BoltenApplied Micro and Optoelectronic (AMO) GmbH
Daniel NeumaierApplied Micro and Optoelectronic (AMO) GmbH

Films

Plasma Al2O3


Film/Plasma Properties

Substrates

HSQ, Hydrogen SilsesQuioxane

Notes

1084