Martin Otto Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Martin Otto returned 5 record(s).

Number	Title
1	Low Resistive Edge Contacts to CVD-Grown Graphene Using a CMOS Compatible Metal
2	Experimental verification of electro-refractive phase modulation in graphene
3	Graphene based on-chip variable optical attenuator operating at 855 nm wavelength
4	Graphene photodetectors with a bandwidth >76 GHz fabricated in a 6" wafer process line
5	Plasma-Enhanced Atomic Layer Deposition of Al₂O₃ on Graphene Using Monolayer hBN as Interfacial Layer