Graphene photodetectors with a bandwidth >76 GHz fabricated in a 6" wafer process line
Type:
Journal
Info:
2017 J. Phys. D: Appl. Phys. 50 124004
Date:
2017-01-26
Author Information
| Name | Institution |
|---|---|
| Daniel Schall | Applied Micro and Optoelectronic (AMO) GmbH |
| Caroline Porschatis | Applied Micro and Optoelectronic (AMO) GmbH |
| Martin Otto | Applied Micro and Optoelectronic (AMO) GmbH |
| Daniel Neumaier | Applied Micro and Optoelectronic (AMO) GmbH |
Films
Film/Plasma Properties
Substrates
Notes
| 991 |