Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


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Caroline Porschatis Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Caroline Porschatis returned 2 record(s).

NumberTitle
1Graphene photodetectors with a bandwidth >76 GHz fabricated in a 6" wafer process line
2Graphene based on-chip variable optical attenuator operating at 855 nm wavelength