2021 Year in Review
The publication database currently has 1628 entries.
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203 Films Compositions
272 Precursors and Plasma Gases
77 Deposition Hardwares
251 Film and Plasma Characteristics
90 Theses
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Effect of atomic layer plasma treatment on TALD-ZrO2 film to improve the corrosion protection of Mg-Ca alloy
Deposition and Characterization of RP-ALD SiO2 Thin Films with Different Oxygen Plasma Powers
Electrochemical Activation of Atomic Layer-Deposited Cobalt Phosphate Electrocatalysts for Water Oxidation
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Experimental verification of electro-refractive phase modulation in graphene
Type:
Journal
Info:
Scientific Reports 5, Article number: 10967 (2015)
Date:
2015-05-12
Author Information
| Name | Institution |
|---|---|
| Muhammad Mohsin | Applied Micro and Optoelectronic (AMO) GmbH |
| Daniel Neumaier | Applied Micro and Optoelectronic (AMO) GmbH |
| Daniel Schall | Applied Micro and Optoelectronic (AMO) GmbH |
| Martin Otto | Applied Micro and Optoelectronic (AMO) GmbH |
| Christopher Matheisen | Applied Micro and Optoelectronic (AMO) GmbH |
| Anna Lena Giesecke | Applied Micro and Optoelectronic (AMO) GmbH |
| Abhay A. Sagade | Applied Micro and Optoelectronic (AMO) GmbH |
| Heinrich Kurz | Applied Micro and Optoelectronic (AMO) GmbH |
Films
Film/Plasma Properties
Substrates
| HSQ, Hydrogen SilsesQuioxane |
Keywords
Notes
| Plasma and thermal ALD Al2O3 films used in graphene-based electro-refractive phase modulation device. |
| 330 |