Publication Information

Title: Experimental verification of electro-refractive phase modulation in graphene

Type: Journal

Info: Scientific Reports 5, Article number: 10967 (2015)

Date: 2015-05-12

DOI: http://dx.doi.org/10.1038/srep10967

Author Information

Name

Institution

Muhammad Mohsin

Applied Micro and Optoelectronic (AMO) GmbH

Daniel Neumaier

Applied Micro and Optoelectronic (AMO) GmbH

Daniel Schall

Applied Micro and Optoelectronic (AMO) GmbH

Martin Otto

Applied Micro and Optoelectronic (AMO) GmbH

Christopher Matheisen

Applied Micro and Optoelectronic (AMO) GmbH

Anna Lena Giesecke

Applied Micro and Optoelectronic (AMO) GmbH

Abhay A. Sagade

Applied Micro and Optoelectronic (AMO) GmbH

Heinrich Kurz

Applied Micro and Optoelectronic (AMO) GmbH

Films

Plasma Al2O3 using Unknown

Deposition Temperature = 300C

TMA, AlMe3, Trimethyl Aluminum

75-24-1

Where to buy precursor

O2, Oxygen

7782-44-7

Thermal Al2O3 using Unknown

Deposition Temperature = 150C

TMA, AlMe3, Trimethyl Aluminum

75-24-1

Where to buy precursor

H2O, Water

7732-18-5

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Substrates

HSQ, Hydrogen SilsesQuioxane

Keywords

Notes

Plasma and thermal ALD Al2O3 films used in graphene-based electro-refractive phase modulation device.

330


Mark Sowa

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