Experimental verification of electro-refractive phase modulation in graphene

Type:
Journal
Info:
Scientific Reports 5, Article number: 10967 (2015)
Date:
2015-05-12

Author Information

Name Institution
Muhammad MohsinApplied Micro and Optoelectronic (AMO) GmbH
Daniel NeumaierApplied Micro and Optoelectronic (AMO) GmbH
Daniel SchallApplied Micro and Optoelectronic (AMO) GmbH
Martin OttoApplied Micro and Optoelectronic (AMO) GmbH
Christopher MatheisenApplied Micro and Optoelectronic (AMO) GmbH
Anna Lena GieseckeApplied Micro and Optoelectronic (AMO) GmbH
Abhay A. SagadeApplied Micro and Optoelectronic (AMO) GmbH
Heinrich KurzApplied Micro and Optoelectronic (AMO) GmbH

Films

Plasma Al2O3


Thermal Al2O3


Film/Plasma Properties

Substrates

HSQ, Hydrogen SilsesQuioxane

Keywords

Notes

Plasma and thermal ALD Al2O3 films used in graphene-based electro-refractive phase modulation device.
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