Experimental verification of electro-refractive phase modulation in graphene

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Publication Information

Title: Experimental verification of electro-refractive phase modulation in graphene

Type: Journal

Info: Scientific Reports 5, Article number: 10967 (2015)

Date: 2015-05-12

DOI: http://dx.doi.org/10.1038/srep10967

Author Information

Name

Institution

Muhammad Mohsin

Applied Micro and Optoelectronic (AMO) GmbH

Daniel Neumaier

Applied Micro and Optoelectronic (AMO) GmbH

Applied Micro and Optoelectronic (AMO) GmbH

Applied Micro and Optoelectronic (AMO) GmbH

Christopher Matheisen

Applied Micro and Optoelectronic (AMO) GmbH

Anna Lena Giesecke

Applied Micro and Optoelectronic (AMO) GmbH

Abhay A. Sagade

Applied Micro and Optoelectronic (AMO) GmbH

Applied Micro and Optoelectronic (AMO) GmbH

Films

Plasma Al₂O₃ using Unknown

Deposition Temperature = 300C

TMA, Trimethyl Aluminum, Trimethylalane, Trimethylaluminium, Aluminium Trimethyl, Aluminum Trimethanide, Al(CH₃)₃, AlMe₃, Al₂(CH₃)₆, Al₂Me₆

75-24-1

Where to buy precursor

7782-44-7

Thermal Al₂O₃ using Unknown

Deposition Temperature = 150C

TMA, Trimethyl Aluminum, Trimethylalane, Trimethylaluminium, Aluminium Trimethyl, Aluminum Trimethanide, Al(CH₃)₃, AlMe₃, Al₂(CH₃)₆, Al₂Me₆

75-24-1

Where to buy precursor

7732-18-5

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Substrates

HSQ, Hydrogen SilsesQuioxane

Keywords

Notes

Plasma and thermal ALD Al₂O₃ films used in graphene-based electro-refractive phase modulation device.

330

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