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An economical, compact inductively coupled plasma source.

Ideal for:
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  • Surface cleaning
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Abhay A. Sagade Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Abhay A. Sagade returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Experimental verification of electro-refractive phase modulation in graphene
2On the Contact Optimization of ALD-Based MoS2 FETs: Correlation of Processing Conditions and Interface Chemistry with Device Electrical Performance
3Low Resistive Edge Contacts to CVD-Grown Graphene Using a CMOS Compatible Metal
4Graphene-based MMIC process development and RF passives design