Publication Information

Title: Electrical characterization of the slow boron oxygen defect component in Czochralski silicon

Type: Journal

Info: physica status solidi (RRL) - Rapid Research Letters Volume 9, Issue 12, pages 692--696, 2015

Date: 2015-10-21

DOI: http://dx.doi.org/10.1002/pssr.201510357

Author Information

Name

Institution

Fraunhofer Institute for Solar Energy Systems (ISE)

Fraunhofer Institute for Solar Energy Systems (ISE)

Fraunhofer Institute for Solar Energy Systems (ISE)

Fraunhofer Institute for Solar Energy Systems (ISE)

Fraunhofer Institute for Solar Energy Systems (ISE)

Films

Plasma Al2O3 using Unknown

Deposition Temperature Range N/A

75-24-1

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Substrates

Silicon

Keywords

Passivation

Notes

469



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