Electrical characterization of the slow boron oxygen defect component in Czochralski silicon
Type:
Journal
Info:
physica status solidi (RRL) - Rapid Research Letters Volume 9, Issue 12, pages 692--696, 2015
Date:
2015-10-21
Author Information
| Name | Institution |
|---|---|
| Tim Niewelt | Fraunhofer Institute for Solar Energy Systems (ISE) |
| Jonas Schön | Fraunhofer Institute for Solar Energy Systems (ISE) |
| Juliane Broisch | Fraunhofer Institute for Solar Energy Systems (ISE) |
| Wilhelm Warta | Fraunhofer Institute for Solar Energy Systems (ISE) |
| Martin C. Schubert | Fraunhofer Institute for Solar Energy Systems (ISE) |
Films
Film/Plasma Properties
Substrates
| Silicon |
Notes
| 469 |