Martin C. Schubert Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Martin C. Schubert returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Light-induced activation and deactivation of bulk defects in boron-doped float-zone silicon
2Stability of effective lifetime of float-zone silicon wafers with AlOx surface passivation schemes under illumination at elevated temperature
3Electrical characterization of the slow boron oxygen defect component in Czochralski silicon