Search 1531 plasma ALD publications by:
Search 1531 plasma ALD publications by:
Publication Information
Title:
Light-induced activation and deactivation of bulk defects in boron-doped float-zone silicon
Type:
Journal
Info:
Journal of Applied Physics 121, 185702 (2017)
Date:
2017-04-23
Author Information
Name | Institution |
---|---|
Tim Niewelt | Fraunhofer Institute for Solar Energy Systems (ISE) |
Marisa Selinger | Fraunhofer Institute for Solar Energy Systems (ISE) |
N. E. Grant | University of Warwick |
Wolfram Kwapil | Fraunhofer Institute for Solar Energy Systems (ISE) |
J. D. Murphy | University of Warwick |
Martin C. Schubert | Fraunhofer Institute for Solar Energy Systems (ISE) |
Films
Film/Plasma Properties
Substrates
Silicon |
Keywords
Solar |
Passivation |
Notes
1029 |
Popular Precursors
Top Authors
Erwin (W.M.M.) Kessels |
Hyeongtag Jeon |
Hyungjun Kim |
Mauritius C. M. (Richard) van de Sanden |
Christophe Detavernier |