2021 Year in Review
The publication database currently has 1616 entries.
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202 Films Compositions
272 Precursors and Plasma Gases
77 Deposition Hardwares
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88 Theses
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Tailoring angular selectivity in SiO2 slanted columnar thin films using atomic layer deposition of titanium nitride
Characterization of Molybdenum Oxide Thin Films Grown by Atomic Layer Deposition
Thermal Interface Enhancement via Inclusion of an Adhesive Layer Using Plasma-Enhanced Atomic Layer Deposition
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Light-induced activation and deactivation of bulk defects in boron-doped float-zone silicon
Type:
Journal
Info:
Journal of Applied Physics 121, 185702 (2017)
Date:
2017-04-23
Author Information
| Name | Institution |
|---|---|
| Tim Niewelt | Fraunhofer Institute for Solar Energy Systems (ISE) |
| Marisa Selinger | Fraunhofer Institute for Solar Energy Systems (ISE) |
| N. E. Grant | University of Warwick |
| Wolfram Kwapil | Fraunhofer Institute for Solar Energy Systems (ISE) |
| J. D. Murphy | University of Warwick |
| Martin C. Schubert | Fraunhofer Institute for Solar Energy Systems (ISE) |
Films
Film/Plasma Properties
Substrates
| Silicon |
Keywords
| Solar |
| Passivation |
Notes
| 1029 |