The publication database currently has 1603 entries.
Search from:
200 Films Compositions
271 Precursors and Plasma Gases
76 Deposition Hardwares
249 Film and Plasma Characteristics
85 Theses
Use Multifactor Search for more complex searches and for searching by other criteria (author, affiliation, analysis, deposition temperature)
ALD Links
Contact Us
Advertising
Search 1603 plasma ALD publications by:
Search 1603 plasma ALD publications by:
Light-induced activation and deactivation of bulk defects in boron-doped float-zone silicon
Type:
Journal
Info:
Journal of Applied Physics 121, 185702 (2017)
Date:
2017-04-23
Author Information
| Name | Institution |
|---|---|
| Tim Niewelt | Fraunhofer Institute for Solar Energy Systems (ISE) |
| Marisa Selinger | Fraunhofer Institute for Solar Energy Systems (ISE) |
| N. E. Grant | University of Warwick |
| Wolfram Kwapil | Fraunhofer Institute for Solar Energy Systems (ISE) |
| J. D. Murphy | University of Warwick |
| Martin C. Schubert | Fraunhofer Institute for Solar Energy Systems (ISE) |
Films
Film/Plasma Properties
Substrates
| Silicon |
Keywords
| Solar |
| Passivation |
Notes
| 1029 |