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N. E. Grant Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by N. E. Grant returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
| Number | Title |
|---|---|
| 1 | Light-induced activation and deactivation of bulk defects in boron-doped float-zone silicon |