Marisa Selinger Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Marisa Selinger returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Stability of effective lifetime of float-zone silicon wafers with AlOx surface passivation schemes under illumination at elevated temperature|
|2||Light-induced activation and deactivation of bulk defects in boron-doped float-zone silicon|