Search 1530 plasma ALD publications by:
Search 1530 plasma ALD publications by:
Publication Information
Title:
Total-dose radiation response and and post-irradiation annealing response of Hafnium capacitors
Type:
Conference Proceedings
Info:
2016 Joint IEEE International Symposium on the Applications of Ferroelectrics, European Conference on Application of Polar Dielectrics, and Piezoelectric Force Microscopy Workshop (ISAF/ECAPD/PFM)
Date:
2016-08-21
Author Information
Name | Institution |
---|---|
Xin Liu | Xi'an Jiaotong University |
Yuqiu Lei | Xi'an Jiaotong University |
Yonghong Cheng | Xi'an Jiaotong University |
Films
Film/Plasma Properties
Characteristic: Midgap Voltage
Analysis: C-V, Capacitance-Voltage Measurements
Characteristic: Interface Trap Density
Analysis: C-V, Capacitance-Voltage Measurements
Substrates
Silicon |
Keywords
Radiation Hardness |
Notes
973 |
Popular Precursors
Top Authors
Erwin (W.M.M.) Kessels |
Hyeongtag Jeon |
Hyungjun Kim |
Mauritius C. M. (Richard) van de Sanden |
Christophe Detavernier |