Organic thin-film transistors with sub-10-micrometer channel length with printed polymer/carbon nanotube electrodes

Type:
Journal
Info:
Organic Electronics, Volume 52, 2018, Pages 165 - 171
Date:
2017-10-17
DOI:
https://doi.org/10.1016/j.orgel.2017.10.023

Author Information

Name Institution
So Hyun ParkYeungnam University
Jiye KimPohang University of Science and Technology (POSTECH)
Seungyoung LeeYeungnam University
Dong Yun LeeKyungpook National University
Sooman LimChonbuk National University
Jaewoong LeeYeungnam University
Se Hyun KimYeungnam University

Films

Plasma Al2O3

Hardware used: Unknown
TMA, Trimethylaluminum, Trimethylalumane, AlMe3, Al(CH3)3
CAS#: 75-24-1
Where to buy precursor
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature = 100C

Film/Plasma Properties

Substrates

Silicon

Keywords

Gate Dielectric

Notes

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