Inductively coupled plasma sources from Plasma ALD, LLC.


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Jaewoong Lee Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Jaewoong Lee returned 2 record(s).

NumberTitle
1Organic thin-film transistors with sub-10-micrometer channel length with printed polymer/carbon nanotube electrodes
2Comparative Studies of Atomic Layer Deposition and Plasma-Enhanced Atomic Layer Deposition Ta2O5 and the Effects on Electrical Properties of In situ Nitridation