Search 1553 plasma ALD publications by:
Search 1553 plasma ALD publications by:
Publication Information
Title:
Device Performances Related to Gate Leakage Current in Al2O3/AlGaN/GaN MISHFETs
Type:
Journal
Info:
JOURNAL OF SEMICONDUCTOR TECHNOLOGY AND SCIENCE, VOL.14, NO.5, OCTOBER, 2014
Date:
2014-07-30
Author Information
Name | Institution |
---|---|
Do-Kywn Kim | Kyungpook National University |
Films
Film/Plasma Properties
Substrates
Keywords
Notes
204 |
Popular Precursors
Top Authors
Erwin (W.M.M.) Kessels |
Hyeongtag Jeon |
Hyungjun Kim |
Mauritius C. M. (Richard) van de Sanden |
Christophe Detavernier |