2022 Year in Review

August 2023 Stats

The publication database currently has 1692 entries.

210 Films

283 Precursors

78 Dep Hardware Sets

255 Characteristics

94 Theses

5191 Authors

Use Advanced Search for more complex searches

2021 Year in Review

Recent Database Additions

Ferroelectricity of Hf_xZr_1-xO₂ thin films fabricated by 300°C low temperature process with plasma-enhanced atomic layer deposition Hydrogen-induced abstraction mechanism of surface methyl groups in atomic-layer-epitaxy of germanium Hydrogen-plasma-assisted hybrid atomic layer deposition of Ir thin film as novel Cu diffusion barrier Self-limiting diamond growth from alternating CF_x and H fluxes Sub-10-nm ferroelectric Gd-doped HfO₂ layers

Liquid-phase-deposited siloxane-based capping layers for silicon solar cells

Type:

Journal

Info:

APPLIED PHYSICS LETTERS 106, 052104 (2015)

Date:

2015-01-23

DOI:

http://dx.doi.org/10.1063/1.4907533

Author Information

Name	Institution
Boris Veith-Wolf	Institute for Solar Energy Research Hamelin (ISFH)
Jianhui Wang	Optitune International Pte. Ltd.
Milja Hannu-Kuure	Optitune International Pte. Ltd.
Ning Chen	Optitune International Pte. Ltd.
Admir Hadzic	Optitune International Pte. Ltd.
Paul Williams	Optitune International Pte. Ltd.
Jarkko Leivo	Optitune International Pte. Ltd.
Ari Karkkainen	Optitune International Pte. Ltd.
Jan Schmidt	Institute for Solar Energy Research Hamelin (ISFH)

Films

Plasma Al₂O₃

Hardware used: Unknown

Deposition Temperature Range N/A

Film/Plasma Properties

Substrates

Silicon

Keywords

Passivation
Solar

Notes

PEALD A₂O₃ used for crystalline silicon solar cell passivation.
320