Publication Information

Title: Liquid-phase-deposited siloxane-based capping layers for silicon solar cells

Type: Journal

Info: APPLIED PHYSICS LETTERS 106, 052104 (2015)

Date: 2015-01-23

DOI: http://dx.doi.org/10.1063/1.4907533

Author Information

Name

Institution

Institute for Solar Energy Research Hamelin (ISFH)

Optitune International Pte. Ltd.

Optitune International Pte. Ltd.

Optitune International Pte. Ltd.

Optitune International Pte. Ltd.

Optitune International Pte. Ltd.

Optitune International Pte. Ltd.

Optitune International Pte. Ltd.

Institute for Solar Energy Research Hamelin (ISFH)

Films

Plasma Al2O3 using Unknown

Deposition Temperature Range N/A

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Substrates

Silicon

Keywords

Passivation

Solar

Notes

PEALD A2O3 used for crystalline silicon solar cell passivation.

320



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