Liquid-phase-deposited siloxane-based capping layers for silicon solar cells

Publication Information

Title: Liquid-phase-deposited siloxane-based capping layers for silicon solar cells

Type: Journal

Info: APPLIED PHYSICS LETTERS 106, 052104 (2015)

Date: 2015-01-23

DOI: http://dx.doi.org/10.1063/1.4907533

Author Information

Name

Institution

Boris Veith-Wolf

Institute for Solar Energy Research Hamelin (ISFH)

Optitune International Pte. Ltd.

Milja Hannu-Kuure

Optitune International Pte. Ltd.

Optitune International Pte. Ltd.

Optitune International Pte. Ltd.

Optitune International Pte. Ltd.

Optitune International Pte. Ltd.

Optitune International Pte. Ltd.

Institute for Solar Energy Research Hamelin (ISFH)

Films

Plasma Al₂O₃ using Unknown

Deposition Temperature Range N/A

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Substrates

Silicon

Keywords

Passivation

Solar

Notes

PEALD A₂O₃ used for crystalline silicon solar cell passivation.

320

Shortcuts

Films

Deposition Hardware

Film and Plasma Characteristics

Multi-factor Search

ALD and PEALD Background

On-line PEALD Theses

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