DFT modeling of plasma-assisted atomic layer deposition for Si(110) passivation: formation of boehmite-like chains as γ-Al2O3 precursors
Type:
Journal
Info:
Theor Chem Acc (2016) 135:152
Date:
2016-04-25
Author Information
| Name | Institution |
|---|---|
| Andrey A. Rybakov | Moscow State University |
| Alexander V. Larin | Moscow State University |
| Daniel P. Vercauteren | University of Namur |
| Georgy M. Zhidomirov | Moscow State University |
Films
Film/Plasma Properties
Substrates
Notes
| 790 |