Surface and sensing properties of PE-ALD SnO2 thin film
Type:
Journal
Info:
ELECTRONICS LETTERS 14th April 2005 Vol. 41 No. 8
Date:
2005-05-16
Author Information
| Name | Institution |
|---|---|
| Woonyoung Lee | Chonnam National University |
| Kwangjun Hong | Chosun University |
| Yongju Park | Chosun University |
| Nam-Hoon Kim | Chosun University |
| Yongkook Choi | Chonnam National University |
| Jin-Seong Park | Chosun University |
Films
Film/Plasma Properties
Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy
Characteristic: Gas Sensing
Analysis: Custom
Substrates
| SiO2 |
Notes
| 1262 |