Publication Information

Title: Surface and sensing properties of PE-ALD SnO2 thin film

Type: Journal

Info: ELECTRONICS LETTERS 14th April 2005 Vol. 41 No. 8

Date: 2005-05-16

DOI: http://dx.doi.org/10.1049/el:20058174

Author Information

Name

Institution

Chonnam National University

Chosun University

Chosun University

Chosun University

Chonnam National University

Chosun University

Films

Plasma SnO2 using Unknown

Deposition Temperature Range = 200-400C

1067-33-0

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Chemical Composition, Impurities

XPS, X-ray Photoelectron Spectroscopy

VG Scientific ESCALAB 250

Gas Sensing

Custom

HP 34401A

Substrates

SiO2

Keywords

Sensors

Notes

1262



Shortcuts



© 2014-2019 plasma-ald.com