Publication Information

Title:
Surface and sensing properties of PE-ALD SnO2 thin film
Type:
Journal
Info:
ELECTRONICS LETTERS 14th April 2005 Vol. 41 No. 8
Date:
2005-05-16

Author Information

Name Institution
Woonyoung LeeChonnam National University
Kwangjun HongChosun University
Yongju ParkChosun University
Nam-Hoon KimChosun University
Yongkook ChoiChonnam National University
Jin-Seong ParkChosun University

Films

Plasma SnO2


Film/Plasma Properties

Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy

Characteristic: Gas Sensing
Analysis: Custom

Substrates

SiO2

Keywords

Sensors

Notes

1262