Publication Information

Title: Electrical characterization and reliability analysis of Al2O3/AlGaN/GaN MISH structure

Type: Conference Proceedings

Info: 2014 IEEE International Reliability Physics Symposium, CD.6.1 - CD.6.5

Date: 2014-06-01

DOI: http://dx.doi.org/10.1109/IRPS.2014.6861129

Author Information

Name

Institution

University of California - Los Angeles (UCLA)

Films

Plasma Al2O3 using Unknown

Deposition Temperature = 200C

75-24-1

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Unknown

C-V, Capacitance-Voltage Measurements

Unknown

Unknown

I-V, Current-Voltage Measurements

Unknown

Breakdown Voltage

I-V, Current-Voltage Measurements

Unknown

Substrates

Keywords

Capacitors

Notes

249



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