Publication Information

Title:
Electrical characterization and reliability analysis of Al2O3/AlGaN/GaN MISH structure
Type:
Conference Proceedings
Info:
2014 IEEE International Reliability Physics Symposium, CD.6.1 - CD.6.5
Date:
2014-06-01

Author Information

Name Institution
Jiechen WuUniversity of California - Los Angeles (UCLA)

Films

Plasma Al2O3


Film/Plasma Properties

Characteristic: Unknown
Analysis: C-V, Capacitance-Voltage Measurements

Characteristic: Unknown
Analysis: I-V, Current-Voltage Measurements

Characteristic: Breakdown Voltage
Analysis: I-V, Current-Voltage Measurements

Substrates

Keywords

Capacitors

Notes

249