Publication Information

Title: ZrO2-coated SiC nanowires prepared by plasma-enhanced atomic layer chemical vapor deposition

Type: Journal

Info: Surface Review and Letters, vol. 12, no. 2, (2005) 215-219

Date: 2005-02-15

DOI: http://dx.doi.org/10.1142/S0218625X05006962

Author Information

Name

Institution

Pohang University of Science and Technology (POSTECH)

Pohang University of Science and Technology (POSTECH)

Films

Plasma ZrO2 using Unknown

Deposition Temperature = 150C

2081-12-1

1333-74-0

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Morphology, Roughness, Topography

SEM, Scanning Electron Microscopy

Unknown

Chemical Composition, Impurities

EDS, EDX, Energy Dispersive X-ray Spectroscopy

Unknown

Microstructure

TEM, Transmission Electron Microscope

Unknown

Substrates

SiC

Nanowire

Keywords

Notes

1259



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