Publication Information

Title:
ZrO2-coated SiC nanowires prepared by plasma-enhanced atomic layer chemical vapor deposition
Type:
Journal
Info:
Surface Review and Letters, vol. 12, no. 2, (2005) 215-219
Date:
2005-02-15

Author Information

Name Institution
Youngjo TakPohang University of Science and Technology (POSTECH)
Kijung YongPohang University of Science and Technology (POSTECH)

Films


Film/Plasma Properties

Characteristic: Morphology, Roughness, Topography
Analysis: SEM, Scanning Electron Microscopy

Characteristic: Chemical Composition, Impurities
Analysis: EDS, EDX, Energy Dispersive X-ray Spectroscopy

Characteristic: Microstructure
Analysis: TEM, Transmission Electron Microscope

Substrates

SiC
Nanowire

Keywords

Notes

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