ZrO2-coated SiC nanowires prepared by plasma-enhanced atomic layer chemical vapor deposition
Type:
Journal
Info:
Surface Review and Letters, vol. 12, no. 2, (2005) 215-219
Date:
2005-02-15
Author Information
| Name | Institution |
|---|---|
| Youngjo Tak | Pohang University of Science and Technology (POSTECH) |
| Kijung Yong | Pohang University of Science and Technology (POSTECH) |
Films
Film/Plasma Properties
Characteristic: Morphology, Roughness, Topography
Analysis: SEM, Scanning Electron Microscopy
Characteristic: Chemical Composition, Impurities
Analysis: EDS, EDX, Energy Dispersive X-ray Spectroscopy
Characteristic: Microstructure
Analysis: TEM, Transmission Electron Microscope
Substrates
| SiC |
| Nanowire |
Notes
| 1259 |