ZrTB, Zr[OC(Me)3]4, Zr[OC(CH3)3]4, Zirconium tetra-tert-butoxide, CAS# 2081-12-1

Where to buy

NumberVendorRegionLink
1Pegasus Chemicals🇬🇧Zirconium(IV) tert-butoxide
2Strem Chemicals, Inc.🇺🇸Zirconium(IV) t-butoxide (99.99%-Zr)
3Ereztech🇺🇸Zirconium(IV) tert-butoxide
4Strem Chemicals, Inc.🇺🇸Zirconium(IV) t-butoxide, 99%

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Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Plasma enhanced atomic layer deposition of HfO2 and ZrO2 high-k thin films
2ZrO2-coated SiC nanowires prepared by plasma-enhanced atomic layer chemical vapor deposition
3Characteristics of ZrO2 gate dielectric deposited using Zr(t –butoxide) and Zr(NEt2)4 precursors by plasma enhanced atomic layer deposition method
4ZrO2 Gate Dielectric Deposited by Plasma-Enhanced Atomic Layer Deposition Method