The publication database currently has 1573 entries.
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196 Films Compositions
265 Precursors and Plasma Gases
76 Deposition Hardwares
242 Film and Plasma Characteristics
84 Theses
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Low-temperature growth of gallium oxide thin films by plasma-enhanced atomic layer deposition
Low-temperature plasma-enhanced atomic layer deposition of 2-D MoS2: large area, thickness control and tuneable morphology
Microstructure and Interfaces of Ultra-Thin Epitaxial AlN Films Grown by Plasma-Enhanced Atomic Layer Deposition at Relatively Low Temperatures
Search 1573 plasma ALD publications by:
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Fabrication and Characterization of an Extended-Gate AlGaN/GaN-Based Heterostructure Field-Effect Transistor-Type Biosensor for Detecting Immobilized Streptavidin-Biotin Protein Complexes
Type:
Journal
Info:
Sensors and Materials, Vol. 27, No. 7 (2015) 575--583
Date:
2015-06-15
Author Information
| Name | Institution |
|---|---|
| Hee Ho Lee | Kyungpook National University |
| Myunghan Bae | Kyungpook National University |
| Sung-Hyun Jo | Kyungpook National University |
| Jang-Kyoo Shin | Kyungpook National University |
| Dong Hyeok Son | Kyungpook National University |
| Chul-Ho Won | Kyungpook National University |
| Jung-Hee Lee | Kyungpook National University |
Films
Film/Plasma Properties
Substrates
| AlGaN |
Keywords
Notes
| 368 |