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Characterization of thin Al2O3/SiO2 dielectric stack for CMOS transistors
Designing Multifunctional Cobalt Oxide Layers for Efficient and Stable Electrochemical Oxygen Evolution
Hierarchical Atomic Layer Deposited V2O5 on 3D Printed Nanocarbon Electrodes for High-Performance Aqueous Zinc-Ion Batteries
Piezoelectric Properties of Zinc Oxide Thin Films Grown by Plasma-Enhanced Atomic Layer Deposition
Experimental and numerical analysis of the effects of ion bombardment in silicon oxide (SiO2) plasma enhanced atomic layer deposition (PEALD) processes
Fabrication and Characterization of an Extended-Gate AlGaN/GaN-Based Heterostructure Field-Effect Transistor-Type Biosensor for Detecting Immobilized Streptavidin-Biotin Protein Complexes
Type:
Journal
Info:
Sensors and Materials, Vol. 27, No. 7 (2015) 575--583
Date:
2015-06-15
Author Information
| Name | Institution |
|---|---|
| Hee Ho Lee | Kyungpook National University |
| Myunghan Bae | Kyungpook National University |
| Sung-Hyun Jo | Kyungpook National University |
| Jang-Kyoo Shin | Kyungpook National University |
| Dong Hyeok Son | Kyungpook National University |
| Chul-Ho Won | Kyungpook National University |
| Jung-Hee Lee | Kyungpook National University |
Films
Film/Plasma Properties
Substrates
| AlGaN |
Keywords
Notes
| 368 |