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Fermi level unpinning of GaSb (100) using plasma enhanced atomic layer deposition of Al2O3
Type:
Journal
Info:
Applied Physics Letters 97, 143502 (2010)
Date:
2010-09-02
Author Information
| Name | Institution |
|---|---|
| A. Ali | The Pennsylvania State University |
| H. S. Madan | The Pennsylvania State University |
| A. P. Kirk | University of Texas at Dallas |
| D. A. Zhao | The Pennsylvania State University |
| Devin A. Mourey | The Pennsylvania State University |
| M. K. Hudait | Virginia Tech |
| Robert M. Wallace | University of Texas at Dallas |
| Thomas N. Jackson | The Pennsylvania State University |
| Brian R. Bennett | U.S. Naval Research Laboratory |
| J. Brad Boos | U.S. Naval Research Laboratory |
| Suman Datta | The Pennsylvania State University |
Films
Film/Plasma Properties
Characteristic: Capacitance
Analysis: C-V, Capacitance-Voltage Measurements
Characteristic: Interface Trap Density
Analysis: C-V, Capacitance-Voltage Measurements
Substrates
| GaSb |
Notes
| 704 |