Brian R. Bennett Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Brian R. Bennett returned 5 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Atomic layer deposition of Al2O3 on GaSb using in situ hydrogen plasma exposure
2Electronic properties of atomic-layer-deposited high-k dielectrics on GaSb(001) with hydrogen plasma pretreatment
3Fermi level unpinning of GaSb (100) using plasma enhanced atomic layer deposition of Al2O3
4High quality HfO2/p-GaSb(001) metal-oxide-semiconductor capacitors with 0.8nm equivalent oxide thickness
5Performance enhancement of InAsSb QW-MOSFETs with in-situ H2 plasma cleaning for gate stack formation