Your search for plasma enhanced atomic layer deposition publications authored by Brian R. Bennett returned 5 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Atomic layer deposition of Al2O3 on GaSb using in situ hydrogen plasma exposure|
|2||Electronic properties of atomic-layer-deposited high-k dielectrics on GaSb(001) with hydrogen plasma pretreatment|
|3||Fermi level unpinning of GaSb (100) using plasma enhanced atomic layer deposition of Al2O3|
|4||High quality HfO2/p-GaSb(001) metal-oxide-semiconductor capacitors with 0.8nm equivalent oxide thickness|
|5||Performance enhancement of InAsSb QW-MOSFETs with in-situ H2 plasma cleaning for gate stack formation|
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