J. Brad Boos Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by J. Brad Boos returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Fermi level unpinning of GaSb (100) using plasma enhanced atomic layer deposition of Al2O3
2Atomic layer deposition of Al2O3 on GaSb using in situ hydrogen plasma exposure
3Electronic properties of atomic-layer-deposited high-k dielectrics on GaSb(001) with hydrogen plasma pretreatment