2022 Year in Review

August 2023 Stats


The publication database currently has 1692 entries.
210 Films
283 Precursors
78 Dep Hardware Sets
255 Characteristics
94 Theses
5191 Authors

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2021 Year in Review
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Recent Database Additions
Ferroelectricity of HfxZr1-xO2 thin films fabricated by 300°C low temperature process with plasma-enhanced atomic layer deposition Hydrogen-induced abstraction mechanism of surface methyl groups in atomic-layer-epitaxy of germanium Hydrogen-plasma-assisted hybrid atomic layer deposition of Ir thin film as novel Cu diffusion barrier Self-limiting diamond growth from alternating CFx and H fluxes Sub-10-nm ferroelectric Gd-doped HfO2 layers

Robert M. Wallace Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Robert M. Wallace returned 5 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1In situ plasma enhanced atomic layer deposition half cycle study of Al2O3 on AlGaN/GaN high electron mobility transistors
2High-κ Dielectric on ReS2: In-Situ Thermal Versus Plasma-Enhanced Atomic Layer Deposition of Al2O3
3Spectroscopic and electrical calculation of band alignment between atomic layer deposited SiO2 and β-Ga2O3 (2̅01)
4Fermi level unpinning of GaSb (100) using plasma enhanced atomic layer deposition of Al2O3
5High quality HfO2/p-GaSb(001) metal-oxide-semiconductor capacitors with 0.8nm equivalent oxide thickness

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