Name

Institution

Ava Khosravi

University of Texas at Dallas

Rafik Addou

University of Texas at Dallas

Massimo Catalano

University of Texas at Dallas

Jiyoung Kim

University of Texas at Dallas

Robert M. Wallace

University of Texas at Dallas

Thermal Al₂O₃ using Picosun R200

Deposition Temperature = 200C

TMA, AlMe₃, Trimethyl Aluminum

75-24-1

Where to buy precursor

H₂O, Water

7732-18-5

Plasma Al₂O₃ using Picosun R200

Deposition Temperature = 200C

TMA, AlMe₃, Trimethyl Aluminum

75-24-1

Where to buy precursor

O₂, Oxygen

7782-44-7

Characteristic

Analysis

Diagnostic

Chemical Composition, Impurities

XPS, X-ray Photoelectron Spectroscopy

Omicron EA125

Morphology, Roughness, Topography

AFM, Atomic Force Microscopy

Veeco Dimension 3100

Raman Spectra

Raman Spectroscopy

-

Crystallinity, Crystal Structure, Grain Size, Atomic Structure

HAADF, High-Angle Annular Dark Field

JEOL JEM ARM 200

ReS₂

Plasma vs Thermal Comparison

1283