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Search 1536 plasma ALD publications by:
Publication Information
Title:
Schottky Barrier Height Reduction at Interface Between GZO Transparent Electrode and InP/InGaAs Structure by Zinc Driven-in Step and Nickel Oxide Insertion
Type:
Journal
Info:
IEEE Electron Device Letters (Volume:35, Issue: 12)
Date:
2014-10-14
Author Information
Name | Institution |
---|---|
Yueh-Lin Lee | National Tsing Hua University |
Films
Film/Plasma Properties
Substrates
Keywords
TCO, Transparent Conducting Oxide |
Doping |
Notes
PEALD Ga-doped ZnO as TCO electrode. |
283 |
Popular Precursors
Top Authors
Erwin (W.M.M.) Kessels |
Hyeongtag Jeon |
Hyungjun Kim |
Mauritius C. M. (Richard) van de Sanden |
Christophe Detavernier |