Influence of the charge trap density distribution in a gate insulator on the positive-bias stress instability of amorphous indium-gallium-zinc oxide thin-film transistors
Type:
Journal
Info:
Applied Physics Letters 108, 182104 (2016)
Date:
2016-04-26
Author Information
Name | Institution |
---|---|
Eungtaek Kim | Korea Advanced Institute of Science and Technology |
Choong-Ki Kim | Korea Advanced Institute of Science and Technology |
Myung Keun Lee | Korea Advanced Institute of Science and Technology |
Tewook Bang | Korea Advanced Institute of Science and Technology |
Yang-Kyu Choi | Korea Advanced Institute of Science and Technology |
Sang-Hee Ko Park | Korea Advanced Institute of Science and Technology |
Kyung Cheol Choi | Korea Advanced Institute of Science and Technology |
Films
Film/Plasma Properties
Characteristic: Thickness
Analysis: Ellipsometry
Characteristic: Thickness
Analysis: TEM, Transmission Electron Microscope
Characteristic: Transistor Characteristics
Analysis: Transistor Characterization
Substrates
IGZO |
Notes
868 |