Search Plasma ALD Publication Database By...

Publication Information

Title: Anisotropic Inter-Poly Dielectric technology for conventional floating gate type flash memory

Type: Conference Proceedings

Info: 2014 IEEE 6th International Memory Workshop (IMW)

Date: 2014-05-18

DOI: http://dx.doi.org/10.1109/IMW.2014.6849362

Author Information

Name

Institution

Toshiba Corporation

Films

Plasma SiNx using Unknown

Deposition Temperature Range N/A

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Substrates

Keywords

Flash Memory

Notes

239



Shortcuts



© 2014-2018 plasma-ald.com