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Search 1556 plasma ALD publications by:
Anisotropic Inter-Poly Dielectric technology for conventional floating gate type flash memory
Type:
Conference Proceedings
Info:
2014 IEEE 6th International Memory Workshop (IMW)
Date:
2014-05-18
Author Information
Name | Institution |
---|---|
F. Kikushima | Toshiba Corporation |
Films
Film/Plasma Properties
Substrates
Keywords
Flash Memory |
Notes
239 |
Popular Precursors
Top Authors
Erwin (W.M.M.) Kessels |
Hyeongtag Jeon |
Hyungjun Kim |
Mauritius C. M. (Richard) van de Sanden |
Christophe Detavernier |