Publication Information

Title:
(Invited) Characteristics of RuO2/TiO2/Al2O3/TiO2/RuO2 Capacitors
Type:
Journal
Info:
ECS Transactions, 80 (1) 365-371 (2017)
Date:
2017-10-05

Author Information

Name Institution
Toshihide NabatameNational Institute for Materials Science (NIMS)

Films

Plasma RuO2


Film/Plasma Properties

Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy

Substrates

TiO2

Keywords

Capacitors

Notes

1055