(Invited) Characteristics of RuO2/TiO2/Al2O3/TiO2/RuO2 Capacitors
Type:
Journal
Info:
ECS Transactions, 80 (1) 365-371 (2017)
Date:
2017-10-05
Author Information
| Name | Institution |
|---|---|
| Toshihide Nabatame | National Institute for Materials Science (NIMS) |
Films
Film/Plasma Properties
Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy
Substrates
| TiO2 |
Notes
| 1055 |