RuO2 Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing RuO2 films returned 11 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Enhanced Dielectric Properties of SrTiO3 Films with a SrRuO3 Seed by Plasma-Enhanced Atomic Layer Deposition
2Improvement of smooth surface of RuO2 bottom electrode on Al2O3 buffer layer and characteristics of RuO2/TiO2/Al2O3/TiO2/RuO2 capacitors
3(Invited) Characteristics of RuO2/TiO2/Al2O3/TiO2/RuO2 Capacitors
4Effect of annealing conditions on formation of SrRuO3 films by interfacial reaction of SrO/RuO2 bi-layer films
5Ru Thin Film Formation Using Oxygen Plasma Enhanced ALD and Rapid Thermal Processing
6ALD ruthenium oxide-carbon nanotube electrodes for supercapacitor applications
7Atomic layer deposition of RuO2 thin films on SiO2 using Ru(EtCp)2 and O2 plasma
8Radical Enhanced Atomic Layer Deposition of Metals and Oxides
9Atomic Layer Deposition of Ruthenium and Ruthenium Oxide Using a Zero-Oxidation State Precursor
10Temperature controlled Ru and RuO2 growth via O* radical-enhanced atomic layer deposition with Ru(EtCp)2
11Solid Electrolyte Lithium Phosphous Oxynitride as a Protective Nanocladding Layer for 3D High-Capacity Conversion Electrodes