Publication Information

Title:
ALD ruthenium oxide-carbon nanotube electrodes for supercapacitor applications
Type:
Conference Proceedings
Info:
2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)
Date:
2014-01-26

Author Information

Name Institution
Roseanne WarrenUniversity of California - Berkeley
Firas SammouraUniversity of California - Berkeley
Alina KozindaUniversity of California - Berkeley
Liwei LinUniversity of California - Berkeley

Films

Thermal RuO2


Film/Plasma Properties

Characteristic: Continuity
Analysis: SEM, Scanning Electron Microscopy

Characteristic: Thickness
Analysis: TEM, Transmission Electron Microscope

Characteristic: Chemical Composition, Impurities
Analysis: XRD, X-Ray Diffraction

Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy

Characteristic: Unknown
Analysis: CV, Cyclic Voltammetry

Characteristic: ESR, Equivalent Series Resistance
Analysis: EIS, Electrochemical Impedance Spectroscopy

Characteristic: Charge Capacity
Analysis: Repeating Chronoamperometry

Substrates

CNTs, Carbon NanoTubes
Silicon

Keywords

PEALD Film Development
Supercapacitor

Notes

Oxygen content of Ru film increases with temperature from 300 to 400C.
Ultratech Fiji PEALD RuO2 for carbon nanotube supercapacitor application.
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